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Field of measurement
- length
Class
- line standards
Interní identifikátor
CMI/69
Quantity
- pitch P
Instrument or artifact
- 1-D grating
Calibration and measurement capabilities
| Range | Calibration and measurement capabilities |
|---|---|
| 0.27 - 10 µm | Q[0,05; 0,2P], P in µm nm |
Technical competence
- CIPM MRA
Guarantee of service
| Guarantee for service | Department |
|---|---|
| RNDr. Petr Balling Ph.D. | Unit of laser metrology (length) |
Method
| Number of procedure | Title of procedure |
|---|---|
| 814-MP-C408 | Measurement of Optical Grating Pitch by Means of Diffractometry |